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Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System
Plasma Therm Versaline RIE- Reactive Ion Etching System

Plasma Therm Versaline RIE- Reactive Ion Etching System

$ 76560

Availability: 100 in stock
  • Restocking Fee: No
  • Return policy details: The buyer has 14 days to return the item (the buyer pays shipping fees). The item will be refunded.
  • Refund will be given as: Money Back
  • Brand: Plasma Therm
  • All returns accepted: Returns Accepted
  • Return shipping will be paid by: Buyer
  • Model: VLR RIE - Versaline
  • Item must be returned within: 14 Days
  • Condition: System is complete but offered as is. Can be offered refurbished, installed with a 90 day warranty for an additional fee.
  • Country of Manufacture: United States

    Description

    Plasma Therm VLR (Versaline) 7000 series Cassette to Cassette RIE system. (1) LM/TM module & (1) RIE Module.  Can run up to 8" dia. wafers.  Cassette to Cassette Load Lock with robot transfer into RIE module. RIE module consist of a Leybold 361C turbo pump with Leybold controller, MKS throttle valve with controller, Advanced Energy RF10S - 1000W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers
    Can offer System refurbished, operational or As is, where is.
    Can offer installation & training as well.
    We also maintain a stocked inventory of spare parts for all Plasmatherm systems.