Shrader Scientific R-3102 E-X410 3 cu. ft.~ RF Sputtering Vacuum Chamber

Description

Shrader Scientific R-3102 E-X410 35" W x 35.25" H x 35.75" D RF 321 Stainless Steel Sputtering Vacuum Chamber System
Comes with what you see in the pictures. If you don't see it, you probably won't get it.
Specifications are from the unit and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This unit came from a government defense contractor. We do not have anyway to test it and are selling it as-is. It looks like the viewport window may need to be replaced and the diffusion pump has some dents in the coil (cooling line). The RF Connector coming out of the matching network is bent.
The Unit's Model Number Tag Reads:
Model Number:
R-3102 E-X410
The Advanced Energy RF Generator's Serial Number Tag Reads:
Part Number:
3155089-004 A
Serial Number:
231071
Firmware Revision:
A
CE Marked:
Yes
The Advanced Energy Remote Control Panel's Serial Number Tag Reads:
Part Number:
3155050-001A
Serial Number:
104068
Firmware Revision:
A
The Advanced Energy AZX Matching Network's Serial Number Tag Reads:
Part Number:
3155031-000G
Serial Number:
102776
Firmware Revision:
G
Main Accessories with it:
Varian "Pot Belly" Diffusion Pump with LN
2
Cold Trap (pump water coil/cooling line has some dents that may need to be fixed)
HVA Vacuum Gate Valve
Advanced Energy RFG 3001 13.56 MHz 3 kW RF Generator/Power Supply
Advanced Energy RFG/AZX Remote Panel Control
Advanced Energy AZX Match Network
Approx. Dimensions:
Inside the Chamber:
35" W x 35.25" H x 35.75" D
Lining inside the Chamber:
32.75" W x 33.5" H x 34" D
Material of Targets/Electrodes (these were measured with our XRF which sometimes gives odd results so please keep that in mind):
Right:
89.94% Cu/2.75" Au
Middle:
93% Cr (There was some paperwork that said there was an Iron-Chromium-Tantulum Target, Bonded to Torus, 10 Type, .100 Thick, PN: EJUFECRTAT10)
Left:
94% Ti
For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a 0.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination.
Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:
(1) Are you the end-user of this item?
(2) If you are not the ultimate end-user of the item, please state the ultimate end user's name.
(3) What is the ultimate country destination?
02/21/20