TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius No Front Cover Spare

Description

TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius No Front Cover Working Spare
Inventory # K-7249
Part no: ADH
Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System
Installed Components
Parts List
Assembly Part No: 5087-401692-19 BASE(HP) ASSY,BACK
1 5010-101312-12 FRAME 1
2 5003-300048-11 BRACKET(R) 1
3 5010-405342-11 PLATE 1
4 5003-300047-11 BRACKET(L) 1
5 5010-405930-11 BRACKET 1
6 5010-405344-11 COLLAR 1
7 5010-306424-11 COVER 1
8 5010-407435-11 SEAL 2
9 5003-200013-11 DUCT(R) 1
10 5003-200012-11 DUCT(L) 1
11 5010-309775-11 PLATE 2
12 5003-300040-11 PORT 2
13 5010-309520-11 SHUTTER(R) 1
14 5010-309519-11 SHUTTER(L) 1
15 5010-404625-11 PLATE 2
16 5010-407356-11 BRACKET 2
17 5010-404632-11 SUPPORT,PIN 1
18 5010-405346-11 BRACKET 1
19 5010-405347-11 SEAL 1
20 5010-405348-11 SEAL 1
26 5010-406157-11 PLATE 1
27 5010-406155-11 PLATE 1
28 5010-406158-11 PLATE 1
29 5010-406156-11 PLATE 1
32 5010-407046-11 PLATE 2
33 5010-405582-11 PACKING 2
34 5086-403977-11 SENSOR,CYLINDER ADH U/D #02 1
35 5086-400794-11 SENSOR,PROXIMITY ADH #01 1
36 5086-401786-11 SENSOR,PROXIMITY ADH #02 1
37 5086-400797-12 SENSOR,THERMOSTAT LHP #01 1
39 5041-000236-11 CABLE ASSY 1746253-3(THERMO EXT #03) 1
101 5018-000014-11 LM GUIDE LS200118ALK1 2
102 020-006514-1 CAP SCREW CBSST6-12 1
103 5024-000080-11 AIR CYLINDER SSD-T1L2550-X09 1
104 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
105 028-003339-1 FITTING,TUBE M-5HL-6 2
106 026-007246-1 SPACER WSSS5-3-1 8
201 020-000005-1 CAP SCREW M3*6 SUS304 20
202 020-001091-1 CAP SCREW M4*16 SUS304 8
203 020-000518-1 CAP SCREW M3*4 SUS304 11
204 020-000012-1 CAP SCREW M3*12 SUS304 2
205 020-000057-1 CAP SCREW M5*12 SUS304 8
206 020-001167-1 CAP SCREW M5*10 SUS304 8
207 020-000090-1 CAP SCREW M6*20 SUS304 4
208 020-000030-1 CAP SCREW M4*8 SUS304 4
209 032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND 1
210 026-102041-1 SET PLATE TM-147-1-5563 WASHER 2
211 020-000009-1 CAP SCREW M3*10 SUS304 4
212 020-000414-1 CAP SCREW M2*4 SUS304 2
213 020-001126-1 SET SCREW M4*5 SUS304 2
216 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 9
Assembly Part No: 5087-401608-12 PIN(ADH) ASSY
1 5010-305466-11 BASE,PIN 1
2 5010-311607-11 BRACKET 1
3 5010-404667-11 PLATE 1
4 5010-400930-11 COLLAR 1
5 5010-404577-11 ROD 1
6 5010-401163-11 PLATE 1
7 5010-307257-11 PLATE 1
8 5010-306713-11 BLOCK 1
9 5086-403976-11 SENSOR,CYLINDER ADH U/D #01 1
10 5003-400007-11 PIN(56) 3
101 026-005603-1 SPACER WSSS10-4-1 1
102 5024-000079-11 AIR CYLINDER SSD-T1L1623-X06 1
103 5018-000011-11 LM GUIDE LS150080CLK1 1
104 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
201 020-000028-1 CAP SCREW M4*6 SUS304 2
202 020-000510-1 CAP SCREW M2.6*10 SUS304 3
203 020-000032-1 CAP SCREW M4*10 SUS304 7
204 020-000642-1 CAP SCREW M3*55 SUS304 4
205 020-002059-1 SET SCREW M3*5 SUS304 2
206 020-000519-1 CAP SCREW M3*16 SUS304 2
207 020-000005-1 CAP SCREW M3*6 SUS304 2
208 020-001093-1 CAP SCREW M4*14 SUS304 2
209 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 4
Assembly Part No: 5085-407303-12 SUPPORT(ADH) ASSY
1 5010-101307-11 RING(ADH),SUPPORT 1
2 2910-437210-11 PACKING 1
3 2910-420314-11 PACKING 1
4 2910-303824-13 SEAL 1
5 5010-203089-11 FLANGE 1
6 5010-305464-11 PLATE 1
7 5010-403103-11 PACKING 1
8 5010-405457-11 PLATE 2
101 028-002124-1 FITTING,TUBE F900-AT-6.35A 6
102 028-002197-1 FITTING,TUBE F900-H-6.35A 1
103 028-002257-1 FITTING,TUBE F900-L-6.35 5
104 028-002302-1 FITTING,TUBE F900-T-6.35 5
105 028-006637-1 FITTING,RESIN EUT1/4-C1 1
201 020-000057-1 CAP SCREW M5*12 SUS304 12
202 020-000020-1 CAP SCREW M3*20 SUS304 6
203 020-001089-1 CAP SCREW M3*14 SUS304 6
204 020-000028-1 CAP SCREW M4*6 SUS304 12
205 027-000431-1 O-RING BYTON AS568-251 BLACK 2
206 020-000030-1 CAP SCREW M4*8 SUS304 4
Assembly Part No: 5087-401362-16 BASE(E-ADH) ASSY
1 5010-306409-11 COVER 1
2 5010-308906-11 BRACKET 1
3 5010-202625-11 COVER 1
4 5010-404767-11 COVER 1
5 5010-404768-11 COVER 1
6 5010-405337-11 BRACKET 1
7 5010-404318-11 BRACKET 1
8 5010-306706-11 PAN,DRAIN 1
9 5010-101124-11 COVER 1
10 5010-308904-11 BLOCK 1
11 5010-308910-11 BRACKET 1
12 5010-101517-11 BASE 1
13 5003-200010-11 PLATE,COOL 1
14 5010-307207-11 PLATE 1
15 5010-303511-11 PLATE 1
16 5010-403503-11 PLATE 1
18 5010-407044-11 BRACKET 1
19 5010-202632-11 PIPE 1
20 5010-308907-11 SEAT 1
21 5010-405219-11 TUBE 1
22 5041-000255-12 CABLE ASSY 1717319-7 (ADH EXT #01) 1
23 5086-400795-11 CABLE,ADH SIG #01 1
24 5086-400798-11 SENSOR,PRESS ADH VAC #01 1
27 5086-401787-12 CABLE,ADH EXT #04 1
28 5086-402006-11 CABLE,GND ADH #02 1
29 5014-000001-11 ACOUSTIC UNIT REX-B875-CS1 1
30 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) 1
31 5044-000007-11 PCB,I/F TMB2101(BOARD,CONN HPB #01) 1
32 5041-000228-11 CABLE ASSY 1717338-1 (DC ADH PWR #01) 1
33 5041-000232-11 CABLE ASSY 1717320-1 (ADH EMO #01) 1
34 5086-400802-11 CABLE,ADH EMO #02 1
35 5086-401627-11 CABLE,GND ADH #01 1
36 5010-407045-11 BRACKET 2
37 5010-402221-11 HOLDER 1
101 028-004347-1 FITTING,TUBE KJL06-01S 3
102 028-004353-1 FITTING,TUBE KJU06-00 1
103 028-017536-1 FITTING,TUBE IN-233-1369 1
104 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 6
106 5012-000021-11 SOLENOID VALVE SS5Y3-03-X1236 1
108 5012-000069-11 AIR OPERATION VALVE AMG01-8BUR-X0421-TC 1
110 028-003337-1 FITTING,TUBE M-5H-4 3
111 028-003338-1 FITTING,TUBE M-5HL-4 3
112 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE 3
114 044-000044-1 SUPPORT,PCB EM-3 8
115 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
201 020-001178-1 CAP SCREW M3*30 SUS304 4
202 020-000517-1 CAP SCREW M3*3 SUS304 16
203 020-001186-1 CAP SCREW M3*35 SUS304 4
204 020-000042-1 CAP SCREW M4*20 SUS304 2
206 020-000005-1 CAP SCREW M3*6 SUS304 10
207 020-000028-1 CAP SCREW M4*6 SUS304 8
208 020-000032-1 CAP SCREW M4*10 SUS304 13
209 020-002601-1 BAIND SCREW M3*4 SUS304 4
210 028-002157-1 FITTING,TUBE F900-F-9.52 1
211 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS30
212 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
Assembly Part No: 5085-407301-12 COVER(HP) ASSY
1 5010-309431-11 COVER 1
2 5010-307203-11 COVER 1
3 5010-309407-11 COVER 1
4 5010-307205-11 COVER 1
5 5010-405349-11 BRACKET 1
6 5010-405797-11 BRACKET 1
201 020-002601-1 BAIND SCREW M3*4 SUS304 6
202 020-000518-1 CAP SCREW M3*4 SUS304 8
203 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
Assembly Part No: 5085-402644-12 PLATE(ADH) ASSY
1 5010-402349-11 GUIDE 6
2 5043-000005-12 HOT PLATE NGT12-HP(ADH)-FCJ 1
201 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS3044
Assembly Part No: 5085-411882-11 PLATE(200-ADH) ASSY
1 5010-402349-11 GUIDE 6
101 5043-000010-11 HOT PLATE NGT12-8-ADH-FCJ 1
201 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304
Assembly Part No: 5085-407298-13 CHAMBER(ADH) ASSY
1 5010-101192-11 CHAMBER 1
2 5010-202745-11 NOZZLE 1
3 5010-404889-11 PLATE 1
4 5010-202646-11 BRACKET 1
5 5010-405338-11 SHAFT 4
6 5010-405339-11 COLLAR 4
7 5010-401175-11 PLATE 4
8 5010-405602-11 SPACER 4
9 5010-405340-11 BRACKET 1
10 5010-202627-11 ARM(L) 1
11 5010-203123-11 ARM(R) 1
12 5010-309220-11 BRACKET(R) 1
13 5010-309221-11 BRACKET(L) 1
14 5010-407238-11 PLATE 2
15 5010-405691-11 BRACKET 1
16 5010-405729-11 BLOCK 1
101 027-000088-1 O-RING BYTON AS568-023 BLACK 1
102 5036-000001-11 #MAGNET TZ-0082 1
201 020-000020-1 CAP SCREW M3*20 SUS304 6
202 020-000417-1 CAP SCREW M2*10 SUS304 2
203 020-000028-1 CAP SCREW M4*6 SUS304 6
204 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 8
207 020-001116-1 CAP SCREW M5*8 SUS304 4
208 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 10
Assembly Part No: 5085-408278-14 COVER(ADH)ASSY,BACK
1 5010-307662-11 BASE,PANEL 1
2 5010-306689-11 PANEL 1
3 5010-306690-11 PLATE,NUT 1
4 5010-306691-11 PLATE,NUT 1
5 5010-307111-11 PACKING 1
6 5010-405584-11 LEVER 2
7 5010-406153-11 BASE,HOLDER 1
8 5010-406150-11 HOLDER 1
9 5010-406148-11 PACKING 1
10 5010-406149-11 PACKING 1
11 5010-308897-11 PANEL 1
101 026-007272-1 SPACER FWSSS-D5-V3-T1.5 5
102 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P02872
103 026-002709-1 HANDLE A-67 1
201 020-000005-1 CAP SCREW M3*6 SUS304 2
202 020-000518-1 CAP SCREW M3*4 SUS304 4
203 020-002603-1 BIND SCREW M3*10 SUS304 13
204 020-000414-1 CAP SCREW M2*4 SUS304 2
206 020-000034-1 CAP SCREW M4*12 SUS304 2
This TEL Tokyo Electron ADH Adhesion Process Station is used working surplus. This item is missing its front cover and brackets, see photos. The physical condition is good, but there are signs of previous use and handling.
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = 32"x24"x20" @ 100 lbs.
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
Lister 12